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AR-COAT

AR-COAT

TOP-COAT
AR-COAT
Evaporation Sources
Quartz Crystal Sensor
Others

Evaporation Materials (EURACOAT)

Physical Properties of coating materials

MATERIAL FORMULA DENSITY (g/cm³) EVAPORATION TEMP. REFELCTIVE AT 500mm SOURCE
Aluminum oxide AI2O3 4.0 2400 ~ 2500 1.64 E
Silicon dioxide SiO2 2.2 1600 ~ 1700 1.46 E
Titanium dioxide TiO2 4.8 1800 ~ 2200 2.35 E
Zirconium oxide ZrO2 5.5 2700 ~ 2850 2.05 E,W
Titanium Pentoxide Ti3O5 4.0 2400 ~ 2450 2.31 E,W
source E : electron beam, W : tungsten boat, Mo : molybdenum boat, Ta : tantalum boat

Reference Data

투과표2
reference_graph

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ai2o3

Technical Information Data Ai2O3 (Evaporation Material)

>  Chemical Fomula : AI2O3
>  CAS No. : 1344-28-1
>  Color : Colorless Clear
>  Amorphous granule type : 1~3mm

Physical Properties of bulk material (at 25℃)

Molecular weight 3.97
Crystal structure Hexagonal
Melting point (℃) 2053
Boiling point 2977
Specific heat (cal/g ℃) 0.18
Thermal conductivity (cal/cm,s,℃) 0.06
Transmittance range (㎛) 0.2 – 7.0
Solubility Negligible

Experimental Condition

Evaporation temperature(℃) 2400 ~ 2500
Evaporation source E.B.

Testing Condition for Evaporation

Coaster Chamber Φ800
Distance from source to substrate (mm) 700
Substrate temperature (℃) 300
Evaporation rate (Å/S) 10
Base pressure(Torr) 5X10⁻⁶
Evaporation pressure(Torr) 2X10⁻⁵ with O2
Substrate S-LAM66
Condition of E.B. AMP Emission
Pre-melting 5.5 350
Evaporation 0 230-240
* a/4 at 500nm

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sio2

Technical Information Data SiO2 (Evaporation Material)

>  Chemical Fomula : SiO2
>  CAS No. : 7631-86-9
>  Color : White Clear
>  Granule type : 1~3mm
>  Tablet type : Φ30 ~ 10 available

Physical Properties of bulk material (at 25℃)

Molecular weight 60.09
Specific gravity 2.2
Shape Amorphous
Melting point (℃) 1700
Boiling point Indistinct
Coefficient of Liner expansion (10X-6) 0.55
Transmittance range (㎛) 0.2 – 9.5

Experimental Condition

Evaporation temperature(℃) 1600 ~ 1700
Source E.B.

Testing Condition for Evaporation

Coaster Chamber Φ800
Evaporation source E.B Gun
Distance from source to substrate (mm) 700
Substrate temperature (℃) 70 or 300
Evaporation rate (Å/S) 20
Base pressure(Torr) 5X10⁻⁶
Evaporation pressure(Torr) 2X10⁻⁵
Substrate S-LAM66
Condition of E.B. AMP Emission Time
Pre-melting 6.0 160 0′ 30″
Evaporation 6 100-120 *0′ 40″
* a/4 at 500nm

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tio2

Technical Information Data TiO2 (Evaporation Material)

>  Chemical Fomula : TiO2
>  Synonym : Titanium(IV) oxide
>  CAS No. : 13463-67-7
>  Color : Black
>  Amorphous granule type : 1~3mm
>  Tablet/pill type : Φ9X5R

Physical Properties of bulk material (at 25℃)

Molecular weight 79.89
Density 4.23
Crystal type Rutile (tetregonal)
Melting point (℃) 1855
Coefficient of liner expansion (x10-6) 8.22
Transmittance range (㎛) 0.43 – 6.2
Purity Titanium dioxide (TiO2) 99.99 min
Chromium (Cr) 0.001 max.
Cobalt (Co) 0.0005 max.
Copper (Cu) 0.001 max.
Iron (Fe) 0.005 max.
Vanadium (V) 0.0005 max.

Experimental Condition

Evaporation temperature(℃) 1800 ~ 2000
Source E.B.
Deposition rate 10nm/sec. in the best condition

Testing Condition for Evaporation

Coaster Chamber Φ800
Evaporation source E.B Gun
Distance from source to substrate (mm) 700
Substrate temperature (℃) 300
Evaporation pressure(Torr) 2X10⁻⁵
Substrate S-BSL7

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zro2

Technical Information Data ZrO2 (Evaporation Material)

>  Chemical Fomula : ZrO2
>  CAS No. : 1314-23-4
>  Color : White
>  Amorphous granule type : 1~3mm
>  Tablet type : Φ18X12 / 10 / 8, Φ14X10, Φ24X18, etc

Physical Properties of bulk material (at 25℃)

Molecular weight 123.22%
Specific gravity 5
Crystal structure Monoclinic
Melting point (℃) 2700
Boiling point 4300
Coefficient of liner expansion (x10-6) 7.2
Transmittance range (㎛) 0.35 – 7

Experimental Condition

Evaporation temperature(℃) 2700 ~ 2850
Source E, W

Testing Condition for Evaporation

Coaster Chamber Φ800
Evaporation source E.B Gun
Distance from source to substrate (mm) 700
Substrate temperature (℃) 70 or 300
Evaporation rate (Å/S) 10
Base pressure(Torr) 5X10⁻⁶
Evaporation pressure(Torr) 2X10⁻⁵
Substrate S-BSL7
Condition of E.B. AMP Emission Time
Pre-melting 6.0 160 0′ 30″
Evaporation 6 100-120 *0′ 40″
* a/4 at 500nm

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ti3o5

Technical Information Data Ti3O5 (Evaporation Material)

>  Chemical Fomula : Ti3O5
>  CAS No. : 12065-65-5
>  Color : Gold/Black
>  Granule type : 1~3mm
>  Amorphous granule type : 0.1 ~ 3mm

Physical Properties of bulk material (at 25℃)

Molecular weight 223.7
Specific gravity 4.0
Shape Monoclinic
Melting point (℃) 1800
Boiling point No data
Coefficient of liner expansion (10X-6) No data
Transmittance range (㎛) 0.4 – 10.0

Experimental Condition

Evaporation temperature(℃) 2400 ~ 2450
Source E.B.

Testing Condition for Evaporation

Coaster Chamber Φ1350
Evaporation source E.B Gun
Distance from source to substrate (mm) 710
Substrate temperature (℃) 300
Evaporation rate (Å/S) No data
Base pressure(Torr) No data
Evaporation pressure(Torr) 2X10⁻⁵
Substrate S-BSL7
Condition of E.B. AMP Emission Time
Pre-melting 4.0 370 0′ 30″
Evaporation 0 350-360 *1′ 00″
* a/4 at 500nm

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Canon Optron Inc. (Japan)

Physical Properties of bulk materials

MATERIAL FORMULA EVAPORATION TEMP(℃) REFELCTIVE AT 500mm SOURCE
Aluminum oxide AI2O3 2400 1.64 E
Antimony oxide Sb2O3 460 2.1 E, W
Bismuth oxide Bi2O3 -* 109 E, W, Ta
Cerium oxide CeO2 1850 2.13 E, W
Chromium oxide Cr2O3 1400 -* E, W
Europium oxide Eu2O3 1765 1.9 E, W
Germanium oxide GeO2 -* -* E
Hafnium oxide HfO2 2750 2 E
Iron oxide Fe2O3 -* -* E, W
Indium oxide In2O3 1875 1.9 E, W
Lanthanum oxide La2O3 -* 2 E, W, Ta
Lead oxide PbO 740 -* W
Magnesium oxide MgO 2800 1.72 E, W
Molybdenum oxide MoO3 590 1.9 Mo
Neodymium oxide Nd2O3 1800 2.15 E, W
Niobium oxide Nb2O5 -* 2.2 E
Praseodynium oxide Pr6O11 2000 1.93 E, W
Samarium oxide Sm2O3 1950 1.9 E, E
Scandium oxide Sc2O3 -* 1.9 E, W
Silicon oxide(monoxide) SiO 1080 1.9 E, Mo, Ta
Silicon oxide(dioxide) SiO2 1600 1.46 E
Tantalum oxide Ta2O5 -* 2.1 E, W
Tin oxide SnO2 570 2 Mo, Ta
Titanium oxide(monoxide) TiO 1800 2.35 E, W
Titanium oxide(trioxide) Ti2O3 2400 2.34 E, W
Titanium oxide(dioxide) TiO2 1800 2.35 E
Tungsten oxide WO3 -* 1.68 E, W
Ytterbium oxide Yb2O3 -* 1.93 E, W
Yttrium oxide Y2O3 2300 1.87 E
Zinc oxide ZnO -* 2.1 E
Zirconium oxide ZrO2 2700 2.05 E, W
I.T.O. In2O+SnO2 -* 2 E, W ,Ta
OH-5 -* 1550 2.13 E, W
OM-4 -* 2400 1.66 1.69 E
OM-6 -* 2420 1.70 1.75 E
OS-10 Ti4O7 2400 2.34 E, W
OS-50 Ti3O5 2400 2.31 E,W
Aluninum fluoride AlF3 1000 1.4 Mo,Ta
Barium fluoride BaF2 1300 1.3 E,W,Mo,Ta
Calcium fluoride CaF2 1400 1.4 W,Mo,Ta
Cerium fluoride CeF2 1330 1.63 E,W,Ta
Chiolite Na5Al3F14 1130 1.33 E,W,Ta
Cryolite Na3AlF6 900 1.35 E,W,Ta
Lanthanum fluoride LaF3 1300 1.59 E,W,Ta
Lead fluoride PbF2 600 1.75 W,Mo
Lithium fluoride LiF 850 1.36 Mo,Ta
Magnesium fluoride MgF2 1060 1.38 E,W,Mo,Ta
Neodymium fluoride NdF3 1060 1.38 Mo,Ta
Samarium fluoride SmF3 1285 1.55 E,Ta
Samarium fluoride SmF3 1250 1.6 W,Mo,Ta
Sodium fluoride NaF 830 1.3 E,Mo,Ta
Strontium fluoride SrF2 1370 1.4 E,Mo,Ta
Yttrium fluoride YF3 1250 1.52 E
Zine sulfide ZnS 1000 2.3 E,Mo,Ta
Aluminum Al -* -* E,W
Germanium Ge 1200 4 E,W
Silicon Si 1300 3.3 E
-* data no available
source E : electron beam, W : tungsten boat, Mo : molybdenum boat, Ta : tantalum boat

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TOP-COAT
AR-COAT
Evaporation Sources
Quartz Crystal Sensor
Others

Evaporation Materials (EURACOAT)

Physical Properties of coating materials

evaporation_material_tb1

Reference Data

투과표2
reference_graph

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ai2o3

Technical Information Data Ai2O3 (Evaporation Material)

>  Chemical Fomula : AI2O3
>  CAS No. : 1344-28-1
>  Color : Colorless Clear
>  Amorphous granule type : 1~3mm

Physical Properties of bulk material (at 25℃)

ai2o3_table1

Experimental Condition

ai2o3_table2

Testing Condition for Evaporation

ai2o3_table3

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sio2

Technical Information Data SiO2 (Evaporation Material)

>  Chemical Fomula : SiO2
>  CAS No. : 7631-86-9
>  Color : White Clear
>  Granule type : 1~3mm
>  Tablet type : Φ30 ~ 10 available

Physical Properties of bulk material (at 25℃)

sio2_table1

Experimental Condition

sio2_table2

Testing Condition for Evaporation

sio2_table3

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tio2

Technical Information Data TiO2 (Evaporation Material)

>  Chemical Fomula : TiO2
>  Synonym : Titanium(IV) oxide
>  CAS No. : 13463-67-7
>  Color : Black
>  Amorphous granule type : 1~3mm
>  Tablet/pill type : Φ9X5R

Physical Properties of bulk material (at 25℃)

tio2_table1

Experimental Condition

tio2_table2

Testing Condition for Evaporation

tio2_table3

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zro2

Technical Information Data ZrO2 (Evaporation Material)

>  Chemical Fomula : ZrO2
>  CAS No. : 1314-23-4
>  Color : White
>  Amorphous granule type : 1~3mm
>  Tablet type : Φ18X12 / 10 / 8, Φ14X10, Φ24X18, etc

Physical Properties of bulk material (at 25℃)

zro2_table1

Experimental Condition

zro2_table2

Testing Condition for Evaporation

zro2_table3

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ti3o5

Technical Information Data Ti3O5 (Evaporation Material)

>  Chemical Fomula : Ti3O5
>  CAS No. : 12065-65-5
>  Color : Gold/Black
>  Granule type : 1~3mm
>  Amorphous granule type : 0.1 ~ 3mm

Physical Properties of bulk material (at 25℃)

ti3o5_table1

Experimental Condition

ti3o5_table2

Testing Condition for Evaporation

ti3o5_table3

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Canon Optron Inc. (Japan)

Physical Properties of bulk materials

canonoptron_table1_03

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